JPH02115244U - - Google Patents
Info
- Publication number
- JPH02115244U JPH02115244U JP2397289U JP2397289U JPH02115244U JP H02115244 U JPH02115244 U JP H02115244U JP 2397289 U JP2397289 U JP 2397289U JP 2397289 U JP2397289 U JP 2397289U JP H02115244 U JPH02115244 U JP H02115244U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- waveguide
- dielectric
- coil
- source chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2397289U JPH02115244U (en]) | 1989-03-02 | 1989-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2397289U JPH02115244U (en]) | 1989-03-02 | 1989-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02115244U true JPH02115244U (en]) | 1990-09-14 |
Family
ID=31243418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2397289U Pending JPH02115244U (en]) | 1989-03-02 | 1989-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02115244U (en]) |
-
1989
- 1989-03-02 JP JP2397289U patent/JPH02115244U/ja active Pending
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